g(sh)ǬF(xin)Ƽǰؼg(sh)a(chn)I(y)ҲLJ(gu)(ni)J(rn)ľаl(f)չǰ;ĸg(sh)a(chn)I(y)似g(sh)ߡ(jng)(j)ЧB(qing)Ј(chng)ǰVc(din)˲Ŀ ҇(gu)Ԅ(dng)Č(zhun)ҺĿǰ(f)sϵy(tng)Խ(li)Խ(f)sԄ(dng)ѽ(jng)Ҫԭ֮һǂмg(sh)һF(xin)ڸ֪ϢһҲF(xin)ܻ;W(wng)j(lu)ļg(sh)
xa(chn)I(y)Ҫ͂x҇(gu)Ƽ(jng)(j)(hu)m(x)l(f)չĻA(ch)o(w)ՓڹI(y)^(gu)̿O(sh)ʩr(nng)I(y)t(y)W(xu)h(hun)ơʳƷȫպ(gu)̵I(lng)Ҫ(li)͂ϢzȡԴСͻ(zhun)û(jin)ûͥ((g)˻)һx(sh)F(xin)`(zhn)_ɿ،(sh)r(sh)zy(c)Ѹٸ׃҇(gu)xr
g(sh)Ƅ(dng)Ǽقg(sh)l(f)չıC͙C(j)ʮ(li)Ӽg(sh)A(ch)M(jn)˂g(sh)İl(f)չδ(li)1020꣬y(tng)輼g(sh)M(jn)(A(y)y(c)2014ꡫ2017)Õr(sh)ֱ300mm辧Ƭa(chn)ʹùĵͳɱ켼g(sh)đ(yng)üg(sh)õǰİl(f)չ@o(w)Ɍa(chn)͂܂͂ṩg(sh)ϡĿwl(f)չy(tng)輼g(sh)һֱm(x)2047(wܰl(f)100)څ(_(d)оƬߴĘO)˥(dng)ǰӼg(sh)Ԍѭȿsԭ͡ĦɡɗlA(ch)Ҏ(gu)ȥڱMƽy(tng)輼g(sh)OU(ku)չĿW(xu)ƙM(yng)(MEMS)ͻơǷ(wn)B(ti)()Ӽg(sh)l(f)չеăɴǮ(dng)ǰδ(li)20g(sh)Ҫl(f)չ
ͬr(sh)W(xu)N¼g(sh)ĽںƄ(dng)һQcl(f)չ磺(dng)ǰ҇(gu)c(din)_(ki)l(f)MEMS(cC(j)еĽY(ji))MOMES(MEMScW(xu)ĽY(ji))܂(MEMScCPUϢƼg(sh)ĽY(ji))ﻯW(xu)(MEMSc\g(sh)늻W(xu)ĽY(ji))Լ_(ki)l(f)ľW(wng)j(lu)(MEMSW(wng)j(lu)g(sh)ĽY(ji)){ׂ({g(sh)cмg(sh)ĽY(ji))ǶW(xu)NW(xu)Ƽg(sh)ںϵһ
(1)a(chn)I(y)l(f)չģʽ
ҪγɏĂо_(ki)l(f)a(chn)һlĮa(chn)I(y)l(f)չģʽ(chung)º͇(gu)HY(ji)ϵĿԽʽl(f)չ·ʹ҇(gu)ɞa(chn)(gu)
(2)a(chn)ƷY(ji)(gu)ȫf(xi){(dio)m(x)l(f)չ
a(chn)ƷƷNҪg(sh)߸ֵAбҪa(b)հסƷN
(3)I(y)a(chn)Ҏ(gu)ģ(a(chn))Ҏ(gu)ģ(jng)(j)mҎ(gu)ģ(jng)(j)l(f)չ
VͨÂa(chn)Ҏ(gu)ģ|ֻӋ(j)һЩЙna(chn)Ҏ(gu)ģa(chn)1000f(wn)ֻ()Ӌ(j)һЩߙn͌(zhun)Âa(chn)Ҏ(gu)ģa(chn)ʮf(wn)ֻװf(wn)ֻӋ(j)
(4)a(chn)?q)I(y)l(f)չ
(zhun)I(y)a(chn)ă(ni)飺
1.a(chn)T(mn)(li)ٶ
2.(zhun)T(mn)a(chn)ijһ(yng)I(lng)Ҫijһ(li)ϵЮa(chn)Ʒԫ@^ߵЈ(chng)ռ
3.I(y)Č(zhun)I(y)a(chn)
(5)a(chn)g(sh)Ԅ(dng)l(f)չ
T(mn)(li)ƷNõвϸQ˂켼g(sh)ĶԺ͏(f)sC^(dng)ǰˇ(xin)ĸśr(sh)ˇь(sh)F(xin)ΙC(j)Ԅ(dng)xa(chn)^(gu)ȫԄ(dng)дTyдVCADCAMM(jn)Ԅ(dng)bI(y)C(j)ˣͻ
(6)I(y)c(din)g(sh)쑪(yng)ӏ(qing)ه(li)M(jn)g(sh)M(jn)g(sh)c(chung)µķD(zhun)
(7)I(y)(jng)I(yng)Ҫӿć(gu)(ni)Ј(chng)(gu)(ni)c(gu)ɂ(g)Ј(chng)Y(ji)ϵć(gu)HԽl(f)չ
(8)I(y)Y(ji)(gu)ССeF(tun)(zhun)I(y)a(chn)桱ĸְl(f)չ
(li)ԴӍW(wng)