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l(f)ڣ[2006-9-16]    [3659]ΡЇ(gu)늚Ј(chng)ُ(gu)W(wng)[EM39.com]{(bio)pԄ(dng)L}
      g(sh)ǬF(xin)Ƽǰؼg(sh)a(chn)I(y)ҲLJ(gu)(ni)⹫J(rn)ľаl(f)չǰ;ĸ߼g(sh)a(chn)I(y)似g(sh)ߡ(jng)(j)ЧB͸(qing)Ј(chng)ǰVc(din)˲Ŀ

҇(gu)Ԅ(dng)Č(zhun)ҺĿǰ(f)sϵy(tng)Խ(li)Խ(f)sԄ(dng)ѽ(jng)͹Ҫԭ֮һǂмg(sh)һF(xin)ڸ֪ϢһҲF(xin)ܻ;W(wng)j(lu)ļg(sh)

xa(chn)I(y)Ҫ͂x҇(gu)Ƽ(jng)(j)(hu)m(x)l(f)չĻA(ch)o(w)ՓڹI(y)^(gu)̿O(sh)ʩr(nng)I(y)t(y)W(xu)h(hun)ơʳƷȫպ(gu)̵I(lng)򣬾Ҫ(li)͂ϢzȡԴСͻ(zhun)û(jin)ûͥ((g)˻)һx(sh)F(xin)`(zhn)_ɿ،(sh)r(sh)zy(c)Ѹٸ׃҇(gu)xr

g(sh)Ƅ(dng)Ǽقg(sh)l(f)չıC͙C(j)ʮ(li)΢Ӽg(sh)A(ch)M(jn)˂g(sh)İl(f)չδ(li)1020꣬y(tng)輼g(sh)M(jn)(A(y)y(c)2014ꡫ2017)Õr(sh)ֱ300mm辧Ƭa(chn)ʹùĵͳɱ켼g(sh)͹đ(yng)üg(sh)õǰİl(f)չ@o(w)Ɍa(chn)΢͂܂͂ṩg(sh)ϡĿwl(f)չy(tng)輼g(sh)һֱm(x)2047(wܰl(f)100)څ(_(d)оƬߴĘO)˥(dng)ǰ΢Ӽg(sh)Ԍѭȿsԭ͡ĦɡɗlA(ch)Ҏ(gu)ȥڱMƽy(tng)輼g(sh)OU(ku)չĿW(xu)ƙM(yng)(MEMS)ͻơǷ(wn)B(ti)()΢Ӽg(sh)l(f)չеăɴǮ(dng)ǰδ(li)20g(sh)Ҫl(f)չ

ͬr(sh)W(xu)N¼g(sh)ĽںƄ(dng)һQcl(f)չ磺(dng)ǰ҇(gu)c(din)_(ki)l(f)MEMS(΢c΢C(j)еĽY(ji))MOMES(MEMSc΢W(xu)ĽY(ji))܂(MEMScCPUϢƼg(sh)ĽY(ji))ﻯW(xu)(MEMSc\g(sh)늻W(xu)ĽY(ji))Լ󌢴_(ki)l(f)ľW(wng)j(lu)(MEMSW(wng)j(lu)g(sh)ĽY(ji)){ׂ({׼g(sh)cмg(sh)ĽY(ji))ǶW(xu)NW(xu)Ƽg(sh)ںϵһ

(1)a(chn)I(y)l(f)չģʽ

ҪγɏĂо_(ki)l(f)a(chn)һlĮa(chn)I(y)l(f)չģʽ(chung)º͇(gu)HY(ji)ϵĿԽʽl(f)չ·ʹ҇(gu)ɞa(chn)(gu)

(2)a(chn)ƷY(ji)(gu)ȫf(xi){(dio)m(x)l(f)չ

a(chn)ƷƷNҪ߼g(sh)߸ֵAбҪa(b)հסƷN

(3)I(y)a(chn)Ҏ(gu)ģ(a(chn))Ҏ(gu)ģ(jng)(j)mҎ(gu)ģ(jng)(j)l(f)չ

VͨÂa(chn)Ҏ(gu)ģ|ֻӋ(j)һЩЙna(chn)Ҏ(gu)ģa(chn)1000f(wn)ֻ()Ӌ(j)һЩߙn͌(zhun)Âa(chn)Ҏ(gu)ģa(chn)ʮf(wn)ֻװf(wn)ֻӋ(j)

(4)a(chn)?q)I(y)l(f)չ

(zhun)I(y)a(chn)ă(ni)飺

1.a(chn)T(mn)(li)ٶ

2.(zhun)T(mn)a(chn)ijһ(yng)I(lng)Ҫijһ(li)ϵЮa(chn)Ʒԫ@^ߵЈ(chng)ռ

3.I(y)Č(zhun)I(y)a(chn)

(5)a(chn)g(sh)Ԅ(dng)l(f)չ

T(mn)(li)ƷNõвϸQ˂켼g(sh)ĶԺ͏(f)sC^(dng)ǰˇ(xin)ĸśr(sh)ˇь(sh)F(xin)ΙC(j)Ԅ(dng)xa(chn)^(gu)ȫԄ(dng)дTyдVCADCAMM(jn)Ԅ(dng)b͹I(y)C(j)ˣͻ

(6)I(y)c(din)g(sh)쑪(yng)ӏ(qing)ه(li)M(jn)g(sh)M(jn)g(sh)c(chung)µķD(zhun)

(7)I(y)(jng)I(yng)Ҫӿć(gu)(ni)Ј(chng)(gu)(ni)c(gu)ɂ(g)Ј(chng)Y(ji)ϵć(gu)HԽl(f)չ

(8)I(y)Y(ji)(gu)򡰴ССeF(tun)(zhun)I(y)a(chn)桱ĸְl(f)չ


„(li)ԴӍW(wng)

dֻfϢվ^c(din)C(sh)ϢHD(zhun)dՈ(qng)ע̎




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