(li)ȫ댧(do)wSƺһMEMSo(w)ՓεICO(sh)Ӌ(j)˾ASһֱK˵ķby(c)ԇSB댧(do)wC(j)O(sh)Ҳһ^M(jn)MEMS(li)댧(do)w˾ˆTҊ(jin)治(wn)һゃMEMSˆᣡɴѿɿMEMS(du)ڶ(sh)ȫ댧(do)wS(li)f(shu)ѳɞ횰l(f)չĮa(chn)Ʒ֮@ӶSǰͺ^ͶMEMSЈ(chng)ҪٳL(zhng)̙C(j)MEMS2007ȫs69|Ԫa(chn)ֵ2010ꌢͻưك|ԪP(gun)_(d)115|Ԫ(gu)HIDMSADIFreeScaleⷨ댧(do)w(STM)ԼӢw(Infineon)ȣǵδ(dng)ȫڭh(hun)pٌ(du)MEMSP(gun)ͶYҧoP(gun)ּӴa(j)8Sa(chn)
֮(li)ƫؘ(bio)(zhn)CMOSƳ̵ľAI(y)ҲڼЗlM(jn)һMEMSAЈ(chng)һ_(ti)ec(lin)^ُ(gu)P(gun)C(j)O(sh)䣬㮔(dng)ǰ^A(y)os߀F^m(x)(zh)ԓ(xing)A(y)
BꑵľA^о댧(do)w(li)ؔ(ci)(bo)δA(y)ڣҲƳĬ(du)߷ؐоMEMSAЈ(chng)в(hu)һ֮(d)ϺASɪ(d)ҵMEMSƳаl(f)g(sh)@ʾAS(du)MEMSЈ(chng)ĉ־
O(sh)Ӌ(j)˾ͬҲs@MEMŞĬĬ^_(ti)ICO(sh)Ӌ(j)I(y)ȻҲݔ˲ݔꇣЈ(chng)Ҳ_(ti)ICO(sh)Ӌ(j)^(lin)l(f)o(w)Փǽаl(f)ُ(gu)@ʾMEMSO(sh)Ӌ(j)
WiiuUt⾀Мy(c)Ԫ(yng)ԭͬù(yng)̵ADIcSTM2SNG-SENSORl(f)УMвĄ(dng)(jng)SɭmδB(ti)MEMSЈ(chng)Ҳʾ(du)MEMSЈ(chng)(hu)P(gun)עB(ti)
ٿ˵ķbcy(c)ԇSMEMSby(c)ԇЈ(chng)(jin)ֱÿˮֱҲ^(gu)ԭo(w)MEMSby(c)ԇ?yn)?rn)h(yun)h(yun)^(gu)y(tng)by(c)ԇ߷by(c)ԇռ(g)MEMSa(chn)Ʒɱ_(d)50%(du)ڷby(c)ԇS̠I(yng)Ձ(li)f(shu)^(du)ؕI(xin)@@ӵT̙C(j)_(ti)¹ƷȴSmf(shu)F(xin)A߀δ^@Ą(dng)߀O(sh)̷eOԸ (tng) (tng)^MEMS
ص댧(do)wC(j)O(sh)˲ҪMEMSƷC(j)O(sh)䲿ք(sh)زȱϯ^±(dng)MEMSЈ(chng)߀ѿAΕr(sh)O(sh)SDzмһҪCԼҲM(jn)MEMSЈ(chng)֡Cԡ댧(do)wO(sh)S瑪(yng)òϵȣҲԼMEMSO(sh)ṩһCMEMSǬF(xin)Aΰ댧(do)wa(chn)I(y)(i)
(li)Դ: DigiTimes